Energy dispersive X-ray microanalysis of phosphosilicate glasses (PSG)

A. Tóth, J. E. Puskás

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

EDS peak height ratio method has been used for chemical microanalysis of PSG samples in a scanning electron microscope. We have applied a no-standard inverse ZAF-type correction procedure to calculate working curves as a function of beam energy and take-off angle. With the obtained correction procedure the EDS measurement is fast, precise and accurate compared with other physical techniques. Using this method a proportional relationship has been verified between the PH3/SiH4 ratio of the CVD process and the P concentration of the deposited PSG layer.

Original languageEnglish
Pages (from-to)133-140
Number of pages8
JournalActa Physica Academiae Scientiarum Hungaricae
Volume49
Issue number1-3
DOIs
Publication statusPublished - Aug 1980

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microanalysis
takeoff
glass
x rays
electron microscopes
vapor deposition
scanning
energy
curves

ASJC Scopus subject areas

  • Nuclear and High Energy Physics

Cite this

Energy dispersive X-ray microanalysis of phosphosilicate glasses (PSG). / Tóth, A.; Puskás, J. E.

In: Acta Physica Academiae Scientiarum Hungaricae, Vol. 49, No. 1-3, 08.1980, p. 133-140.

Research output: Contribution to journalArticle

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