Energy dispersive X-ray microanalysis of phosphosilicate glasses (PSG)

A. L. Tóth, J. E. Puskás

Research output: Contribution to journalArticle

1 Citation (Scopus)


EDS peak height ratio method has been used for chemical microanalysis of PSG samples in a scanning electron microscope. We have applied a no-standard inverse ZAF-type correction procedure to calculate working curves as a function of beam energy and take-off angle. With the obtained correction procedure the EDS measurement is fast, precise and accurate compared with other physical techniques. Using this method a proportional relationship has been verified between the PH3/SiH4 ratio of the CVD process and the P concentration of the deposited PSG layer.

Original languageEnglish
Pages (from-to)133-140
Number of pages8
JournalActa Physica Academiae Scientiarum Hungaricae
Issue number1-3
Publication statusPublished - Aug 1 1980

ASJC Scopus subject areas

  • Nuclear and High Energy Physics

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