Ellipsometric study of nanostructured carbon films deposited by pulsed laser deposition

M. Bereznai, J. Budai, I. Hanyecz, J. Kopniczky, M. Veres, M. Koós, Z. Tóth

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

When depositing carbon films by plasma processes the resulting structure and bonding nature strongly depends on the plasma energy and background gas pressure. To produce different energy plasma, glassy carbon targets were ablated by laser pulses of different excimer lasers: KrF (248 nm) and ArF (193 nm). To modify plume characteristics argon atmosphere was applied. The laser plume was directed onto Si substrates, where the films were grown. To evaluate ellipsometric measurements first a combination of the Tauc-Lorentz oscillator and the Sellmeier formula (TL/S) was applied. Effective Medium Approximation models were also used to investigate film properties. Applying argon pressures above 10 Pa the deposits became nanostructured as indicated by high resolution scanning electron microscopy. Above ∼ 100 and ∼ 20 Pa films could not be deposited by KrF and ArF laser, respectively. Our ellipsometric investigations showed, that with increasing pressure the maximal refractive index of both series decreased, while the optical band gap starts with a decrease, but shows a non monotonous course. Correlation between the size of the nanostructures, bonding structure, which was followed by Raman spectroscopy and optical properties were also investigated.

Original languageEnglish
Pages (from-to)2989-2993
Number of pages5
JournalThin Solid Films
Volume519
Issue number9
DOIs
Publication statusPublished - Feb 28 2011

Fingerprint

Carbon films
Pulsed laser deposition
pulsed laser deposition
Argon
Plasmas
carbon
plumes
Lasers
High resolution electron microscopy
Optical band gaps
argon
Glassy carbon
Excimer lasers
lasers
Raman spectroscopy
Laser pulses
Nanostructures
Refractive index
glassy carbon
Deposits

Keywords

  • Carbon
  • Nanoporous
  • Pulsed laser deposition
  • Spectroscopic ellipsometry
  • Thin film

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Ellipsometric study of nanostructured carbon films deposited by pulsed laser deposition. / Bereznai, M.; Budai, J.; Hanyecz, I.; Kopniczky, J.; Veres, M.; Koós, M.; Tóth, Z.

In: Thin Solid Films, Vol. 519, No. 9, 28.02.2011, p. 2989-2993.

Research output: Contribution to journalArticle

Bereznai, M. ; Budai, J. ; Hanyecz, I. ; Kopniczky, J. ; Veres, M. ; Koós, M. ; Tóth, Z. / Ellipsometric study of nanostructured carbon films deposited by pulsed laser deposition. In: Thin Solid Films. 2011 ; Vol. 519, No. 9. pp. 2989-2993.
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