Ellipsometric study of ion-implantation damage in single-crystal silicon - An advanced optical model

P. Petrik, O. Polgár, T. Lohner, M. Fried, N. Q. Khánh, J. Gyulai

Research output: Contribution to journalConference article

1 Citation (Scopus)

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy