Electron spectroscopy of porous silicon layers. Indirect detection of hydrogen by elastic peak electron spectroscopy

G. Gergely, B. Gruzza, L. Bideux, P. Bondot, C. Jardin, E. Vázsonyi

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Efficient visible luminescence from porous Si (PSi) layers is associated with the quantum size and the presence of hydrogen as a passivaant on the inner surface. The increase of the amount of H was performed by wet chemical etching in HF, producing the increase of photoluminescence intensity. The detection of H is not possible by AES or XPS and is difficult even with EELS. Elastic peak electron spectroscopy (EPES) showed a large decrease of the elastic reflection coefficient re appearing in the elastic peak, and measured with a retarding field analyzer (RFA). The effective elastic backscattering coefficients of a monolayer of H, Si, O were calculated for the RFA angular window and resulted in reasonable agreement with literature data available. They were completed for the 50-100 eV range. Experiments on a Si(111) wafer verified calculations. A dramatic decrease of re was found on HF-etched PSi (a factor of 3-10) in the 50-100 eV range. Above 200 eV, effects are shadowed by the contribution of deeper layers of the substrate and reduced attenuation of the H adlayer. This indicates the formation of high H coverage on the porous inner surface. Experiments are interpreted by multiple elastic reflection and attenuation of electrons by the H-covered porous surface. Detailed AES and EELS studies made with a hemispherical analyzer resulted in Si and SiO2 bond on the surface.

Original languageEnglish
Pages (from-to)271-274
Number of pages4
JournalSurface and Interface Analysis
Volume22
Issue number1
Publication statusPublished - Jan 1 1994

Fingerprint

Electron spectroscopy
Porous silicon
porous silicon
electron spectroscopy
Hydrogen
analyzers
Electron energy loss spectroscopy
hydrogen
attenuation
retarding
Wet etching
Backscattering
Luminescence
Monolayers
backscattering
Photoluminescence
X ray photoelectron spectroscopy
Experiments
etching
wafers

ASJC Scopus subject areas

  • Colloid and Surface Chemistry
  • Physical and Theoretical Chemistry

Cite this

Electron spectroscopy of porous silicon layers. Indirect detection of hydrogen by elastic peak electron spectroscopy. / Gergely, G.; Gruzza, B.; Bideux, L.; Bondot, P.; Jardin, C.; Vázsonyi, E.

In: Surface and Interface Analysis, Vol. 22, No. 1, 01.01.1994, p. 271-274.

Research output: Contribution to journalArticle

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