Electron shakeup and shakeoff probabilities accompanying inner-shell ionization of atoms were calculated for K-, L- and M-shell electrons using hydrogenic wavefunctions. The dependence of shake probabilities on atomic number Z is estimated. It is found that both shakeoff and shakeup probabilities are proportional to 1/Z2. Based on this Z-dependence, the shakeup-plus-shakeoff probabilities are expressed in a simple analytical form with two parameters.
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