Electron-probe: tool for failure analysis for semiconductor devices

T. Kormány, G. Nagy

Research output: Contribution to journalArticle

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)561-562
Number of pages2
JournalVacuum
Volume22
Issue number11
DOIs
Publication statusPublished - 1972

Fingerprint

failure analysis
electron probes
Semiconductor devices
semiconductor devices
Failure analysis
Electrons

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Electron-probe : tool for failure analysis for semiconductor devices. / Kormány, T.; Nagy, G.

In: Vacuum, Vol. 22, No. 11, 1972, p. 561-562.

Research output: Contribution to journalArticle

Kormány, T. ; Nagy, G. / Electron-probe : tool for failure analysis for semiconductor devices. In: Vacuum. 1972 ; Vol. 22, No. 11. pp. 561-562.
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