Electron irradiation induced amorphous SiO2 formation at metal oxide/Si interface at room temperature; Electron beam writing on interfaces

S. Gurbán, P. Petrik, M. Serényi, A. Sulyok, M. Menyhárd, E. Baradács, B. Parditka, C. Cserháti, G. A. Langer, Z. Erdélyi

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Medicine & Life Sciences