Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms

J. Schulze, E. Schuengel, A. Derzsi, I. Korolov, Z. Donko

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationICOPS/BEAMS 2014 - 41st IEEE International Conference on Plasma Science and the 20th International Conference on High-Power Particle Beams
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781479927111
DOIs
Publication statusPublished - Jan 16 2015
Event41st IEEE International Conference on Plasma Science, ICOPS 2014 and the 20th IEEE International Conference on High-Power Particle Beams, BEAMS 2014 - Washington, United States
Duration: May 25 2014May 29 2014

Publication series

NameICOPS/BEAMS 2014 - 41st IEEE International Conference on Plasma Science and the 20th International Conference on High-Power Particle Beams

Other

Other41st IEEE International Conference on Plasma Science, ICOPS 2014 and the 20th IEEE International Conference on High-Power Particle Beams, BEAMS 2014
CountryUnited States
CityWashington
Period5/25/145/29/14

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Condensed Matter Physics

Cite this

Schulze, J., Schuengel, E., Derzsi, A., Korolov, I., & Donko, Z. (2015). Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms. In ICOPS/BEAMS 2014 - 41st IEEE International Conference on Plasma Science and the 20th International Conference on High-Power Particle Beams [7012493] (ICOPS/BEAMS 2014 - 41st IEEE International Conference on Plasma Science and the 20th International Conference on High-Power Particle Beams). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/PLASMA.2014.7012493