Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms

J. Schulze, E. Schuengel, A. Derzsi, I. Korolov, Z. Donkó

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationICOPS/BEAMS 2014 - 41st IEEE International Conference on Plasma Science and the 20th International Conference on High-Power Particle Beams
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Print)9781479927111
DOIs
Publication statusPublished - Jan 16 2015
Event41st IEEE International Conference on Plasma Science, ICOPS 2014 and the 20th IEEE International Conference on High-Power Particle Beams, BEAMS 2014 - Washington, United States
Duration: May 25 2014May 29 2014

Other

Other41st IEEE International Conference on Plasma Science, ICOPS 2014 and the 20th IEEE International Conference on High-Power Particle Beams, BEAMS 2014
CountryUnited States
CityWashington
Period5/25/145/29/14

Fingerprint

waveforms
heating
electric potential
ions
electrons

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Condensed Matter Physics

Cite this

Schulze, J., Schuengel, E., Derzsi, A., Korolov, I., & Donkó, Z. (2015). Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms. In ICOPS/BEAMS 2014 - 41st IEEE International Conference on Plasma Science and the 20th International Conference on High-Power Particle Beams [7012493] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/PLASMA.2014.7012493

Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms. / Schulze, J.; Schuengel, E.; Derzsi, A.; Korolov, I.; Donkó, Z.

ICOPS/BEAMS 2014 - 41st IEEE International Conference on Plasma Science and the 20th International Conference on High-Power Particle Beams. Institute of Electrical and Electronics Engineers Inc., 2015. 7012493.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Schulze, J, Schuengel, E, Derzsi, A, Korolov, I & Donkó, Z 2015, Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms. in ICOPS/BEAMS 2014 - 41st IEEE International Conference on Plasma Science and the 20th International Conference on High-Power Particle Beams., 7012493, Institute of Electrical and Electronics Engineers Inc., 41st IEEE International Conference on Plasma Science, ICOPS 2014 and the 20th IEEE International Conference on High-Power Particle Beams, BEAMS 2014, Washington, United States, 5/25/14. https://doi.org/10.1109/PLASMA.2014.7012493
Schulze J, Schuengel E, Derzsi A, Korolov I, Donkó Z. Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms. In ICOPS/BEAMS 2014 - 41st IEEE International Conference on Plasma Science and the 20th International Conference on High-Power Particle Beams. Institute of Electrical and Electronics Engineers Inc. 2015. 7012493 https://doi.org/10.1109/PLASMA.2014.7012493
Schulze, J. ; Schuengel, E. ; Derzsi, A. ; Korolov, I. ; Donkó, Z. / Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms. ICOPS/BEAMS 2014 - 41st IEEE International Conference on Plasma Science and the 20th International Conference on High-Power Particle Beams. Institute of Electrical and Electronics Engineers Inc., 2015.
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