Electron beam induced secondary emission changes investigated by work function spectroscopy

Gy Vida, I. Beck, K. Josepovits, M. Gyor, P. Deák

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

The secondary emission coefficient, δ, of a given solid changes upon bombardment of the surface by an electron beam of high current density. Secondary emission and work function changes were measured simultaneously by work function spectroscopy during electron irradiation. The decrease of secondary emission and a successive increase of work function occurred on contaminated Si and W plates. The dependence of the work function- and the secondary emission change on primary energy was observed to be qualitatively the same. The change of δ as a function of primary electron energy has a maximum in the energy region where the mean free path of primaries and secondaries lies in the same range. From the results it can be assumed that the low energy secondaries have a great influence on Δδ.

Original languageEnglish
Pages (from-to)87-93
Number of pages7
JournalApplied Surface Science
Volume227
Issue number1-4
DOIs
Publication statusPublished - Apr 15 2004

Fingerprint

Secondary emission
secondary emission
Electron beams
Spectroscopy
electron beams
spectroscopy
Electron irradiation
electron irradiation
mean free path
high current
energy
bombardment
Current density
electron energy
current density
Electrons
coefficients

Keywords

  • Mean free path
  • Secondary emission
  • Silicon
  • Tungsten
  • Work function

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Surfaces, Coatings and Films
  • Condensed Matter Physics

Cite this

Electron beam induced secondary emission changes investigated by work function spectroscopy. / Vida, Gy; Beck, I.; Josepovits, K.; Gyor, M.; Deák, P.

In: Applied Surface Science, Vol. 227, No. 1-4, 15.04.2004, p. 87-93.

Research output: Contribution to journalArticle

Vida, Gy ; Beck, I. ; Josepovits, K. ; Gyor, M. ; Deák, P. / Electron beam induced secondary emission changes investigated by work function spectroscopy. In: Applied Surface Science. 2004 ; Vol. 227, No. 1-4. pp. 87-93.
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