ELASTIC PEAK ELECTRON SPECTROSCOPY FOR AUGER ELECTRON SPECTROSCOPY AND ELECTRON ENERGY LOSS SPECTROSCOPY.

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Abstract

Elastic peak electron spectroscopy deals with the spectra of secondary electrons in the neighbourhood of Ed//p primary energy and determines them in absolute units based on the N//e percentage of elastically reflected electrons. A procedure is described for evalauting elastic peak spectra. Experimental results on graphite, Si, Ge, stainless steel, Mo, W and Au polycrystalline samples are presented in the medium energy (E//p equals 1-3 keV) range. Spectra were measured with a cylindrical mirror analyzer operated in the direct current mode. For elements (Si, Mo, etc. ) N//e is determined mainly by the atomic number Z, N//e(Z)approximately(Z minus 26)**0**. **6**5 was found for Z greater than equivalent to 26 and E//p equals 3. 1 keV. The E//p dependence of N//e can be approximated by a power law N//e(E//p)approximately E//p** minus ** beta **(**Z**), with beta (Z) varying between 2 and 0. 4 for the Z equals 4-79 atomic number range. The elastic peak is composed of electrons escaping from a surface layer determined by the inelastic mean free path of primary electrons. Using Seah's values and from the N//e experimental data the backscattering cross-sections were determined. They varied between 5 multiplied by 10** minus **2**0(C)-2. 8 multiplied by d10** minus **1**8cm**2(W, Au). Some new results are presneted on the volume plasmon losses. In Si and Ge the mean free path of medium energy electrons is determined by the first volume plasmon loss, whereas in metals the contributions of other loss processes are important. It is practical to use the elastic peak and N//e as references for Auger and loss peaks allowing the estimation of ionization cross-sections in Auger electron spectroscopy.

Original languageEnglish
Pages (from-to)201-205
Number of pages5
JournalSurface and Interface Analysis
Volume3
Issue number5
Publication statusPublished - Oct 1981

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Electron spectroscopy
Electron energy loss spectroscopy
Auger electron spectroscopy
Auger spectroscopy
electron spectroscopy
energy dissipation
electron energy
Electrons
spectroscopy
mean free path
electrons
energy
Graphite
Stainless Steel
ionization cross sections
Backscattering
Ionization
stainless steels
analyzers
backscattering

ASJC Scopus subject areas

  • Colloid and Surface Chemistry
  • Physical and Theoretical Chemistry

Cite this

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title = "ELASTIC PEAK ELECTRON SPECTROSCOPY FOR AUGER ELECTRON SPECTROSCOPY AND ELECTRON ENERGY LOSS SPECTROSCOPY.",
abstract = "Elastic peak electron spectroscopy deals with the spectra of secondary electrons in the neighbourhood of Ed//p primary energy and determines them in absolute units based on the N//e percentage of elastically reflected electrons. A procedure is described for evalauting elastic peak spectra. Experimental results on graphite, Si, Ge, stainless steel, Mo, W and Au polycrystalline samples are presented in the medium energy (E//p equals 1-3 keV) range. Spectra were measured with a cylindrical mirror analyzer operated in the direct current mode. For elements (Si, Mo, etc. ) N//e is determined mainly by the atomic number Z, N//e(Z)approximately(Z minus 26)**0**. **6**5 was found for Z greater than equivalent to 26 and E//p equals 3. 1 keV. The E//p dependence of N//e can be approximated by a power law N//e(E//p)approximately E//p** minus ** beta **(**Z**), with beta (Z) varying between 2 and 0. 4 for the Z equals 4-79 atomic number range. The elastic peak is composed of electrons escaping from a surface layer determined by the inelastic mean free path of primary electrons. Using Seah's values and from the N//e experimental data the backscattering cross-sections were determined. They varied between 5 multiplied by 10** minus **2**0(C)-2. 8 multiplied by d10** minus **1**8cm**2(W, Au). Some new results are presneted on the volume plasmon losses. In Si and Ge the mean free path of medium energy electrons is determined by the first volume plasmon loss, whereas in metals the contributions of other loss processes are important. It is practical to use the elastic peak and N//e as references for Auger and loss peaks allowing the estimation of ionization cross-sections in Auger electron spectroscopy.",
author = "G. Gergely",
year = "1981",
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language = "English",
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journal = "Surface and Interface Analysis",
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AU - Gergely, G.

PY - 1981/10

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N2 - Elastic peak electron spectroscopy deals with the spectra of secondary electrons in the neighbourhood of Ed//p primary energy and determines them in absolute units based on the N//e percentage of elastically reflected electrons. A procedure is described for evalauting elastic peak spectra. Experimental results on graphite, Si, Ge, stainless steel, Mo, W and Au polycrystalline samples are presented in the medium energy (E//p equals 1-3 keV) range. Spectra were measured with a cylindrical mirror analyzer operated in the direct current mode. For elements (Si, Mo, etc. ) N//e is determined mainly by the atomic number Z, N//e(Z)approximately(Z minus 26)**0**. **6**5 was found for Z greater than equivalent to 26 and E//p equals 3. 1 keV. The E//p dependence of N//e can be approximated by a power law N//e(E//p)approximately E//p** minus ** beta **(**Z**), with beta (Z) varying between 2 and 0. 4 for the Z equals 4-79 atomic number range. The elastic peak is composed of electrons escaping from a surface layer determined by the inelastic mean free path of primary electrons. Using Seah's values and from the N//e experimental data the backscattering cross-sections were determined. They varied between 5 multiplied by 10** minus **2**0(C)-2. 8 multiplied by d10** minus **1**8cm**2(W, Au). Some new results are presneted on the volume plasmon losses. In Si and Ge the mean free path of medium energy electrons is determined by the first volume plasmon loss, whereas in metals the contributions of other loss processes are important. It is practical to use the elastic peak and N//e as references for Auger and loss peaks allowing the estimation of ionization cross-sections in Auger electron spectroscopy.

AB - Elastic peak electron spectroscopy deals with the spectra of secondary electrons in the neighbourhood of Ed//p primary energy and determines them in absolute units based on the N//e percentage of elastically reflected electrons. A procedure is described for evalauting elastic peak spectra. Experimental results on graphite, Si, Ge, stainless steel, Mo, W and Au polycrystalline samples are presented in the medium energy (E//p equals 1-3 keV) range. Spectra were measured with a cylindrical mirror analyzer operated in the direct current mode. For elements (Si, Mo, etc. ) N//e is determined mainly by the atomic number Z, N//e(Z)approximately(Z minus 26)**0**. **6**5 was found for Z greater than equivalent to 26 and E//p equals 3. 1 keV. The E//p dependence of N//e can be approximated by a power law N//e(E//p)approximately E//p** minus ** beta **(**Z**), with beta (Z) varying between 2 and 0. 4 for the Z equals 4-79 atomic number range. The elastic peak is composed of electrons escaping from a surface layer determined by the inelastic mean free path of primary electrons. Using Seah's values and from the N//e experimental data the backscattering cross-sections were determined. They varied between 5 multiplied by 10** minus **2**0(C)-2. 8 multiplied by d10** minus **1**8cm**2(W, Au). Some new results are presneted on the volume plasmon losses. In Si and Ge the mean free path of medium energy electrons is determined by the first volume plasmon loss, whereas in metals the contributions of other loss processes are important. It is practical to use the elastic peak and N//e as references for Auger and loss peaks allowing the estimation of ionization cross-sections in Auger electron spectroscopy.

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