Efficient catalytic combustion in integrated micropellistors

I. Bársony, M. Ádám, P. Fürjes, R. Lucklum, M. Hirschfelder, S. Kulinyi, Cs Dücso

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

This paper analyses two of the key issues of the development of catalytic combustion-type sensors: the selection and production of active catalytic particles on the micropellistor surface as well as the realization of a reliable thermal conduction between heater element and catalytic surface, for the sensing of temperature increase produced by the combustion. The report also demonstrates that chemical sensor product development by a MEMS process is a continuous struggle for elimination of all uncertainties influencing reliability and sensitivity of the final product.

Original languageEnglish
Article number124009
JournalMeasurement Science and Technology
Volume20
Issue number12
DOIs
Publication statusPublished - Dec 22 2009

Keywords

  • Bulk micromachining
  • Catalytic combustion
  • Electronic nose
  • Explosive gases
  • Integrated pellistors

ASJC Scopus subject areas

  • Instrumentation
  • Engineering (miscellaneous)
  • Applied Mathematics

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