Efficient catalytic combustion in integrated micropellistors

I. Bársony, M. Ádám, P. Fürjes, R. Lucklum, M. Hirschfelder, S. Kulinyi, C. Dücső

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

This paper analyses two of the key issues of the development of catalytic combustion-type sensors: the selection and production of active catalytic particles on the micropellistor surface as well as the realization of a reliable thermal conduction between heater element and catalytic surface, for the sensing of temperature increase produced by the combustion. The report also demonstrates that chemical sensor product development by a MEMS process is a continuous struggle for elimination of all uncertainties influencing reliability and sensitivity of the final product.

Original languageEnglish
Article number124009
JournalMeasurement Science and Technology
Volume20
Issue number12
DOIs
Publication statusPublished - 2009

Fingerprint

Combustion
Active Particles
Chemical Sensor
product development
sensors
Product Development
Chemical sensors
Micro-electro-mechanical Systems
heaters
Product development
Conduction
microelectromechanical systems
MEMS
Elimination
elimination
Sensing
Uncertainty
conduction
Sensor
sensitivity

Keywords

  • Bulk micromachining
  • Catalytic combustion
  • Electronic nose
  • Explosive gases
  • Integrated pellistors

ASJC Scopus subject areas

  • Applied Mathematics
  • Instrumentation

Cite this

Efficient catalytic combustion in integrated micropellistors. / Bársony, I.; Ádám, M.; Fürjes, P.; Lucklum, R.; Hirschfelder, M.; Kulinyi, S.; Dücső, C.

In: Measurement Science and Technology, Vol. 20, No. 12, 124009, 2009.

Research output: Contribution to journalArticle

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