Effects of the focused ion beam parameters on nanopore milling in solid state membranes

Research output: Contribution to journalConference article

4 Citations (Scopus)


This work describes a reliable nanofabrication technology of solid state nanopore arrays. The geometric parameters of pores are achieved and optimized according to the requirements of bioanalytical applications regarding conformation and size of the characteristic proteins in clinical diagnostics. Different structural configurations and material compositions of the nanopore structures were developed and characterised according to the variable biofunctionalisation strategies. The geometry of the fabricated pores were analysed as the statistical function of the focused ion beam milling parameters.

Original languageEnglish
Pages (from-to)684-687
Number of pages4
JournalProcedia Engineering
Publication statusPublished - Jan 1 2012
Event26th European Conference on Solid-State Transducers, EUROSENSOR 2012 - Krakow, Poland
Duration: Sep 9 2012Sep 12 2012



  • Biochemical sensing
  • Focused ion beam
  • Solid state nanopore

ASJC Scopus subject areas

  • Engineering(all)

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