Effects of speckle in Makyoh topography for the studies of extended defects

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Abstract

The effects of the speckle phenomenon on Makyoh-topography imaging is analysed. The speckle manifests itself as a quasiperiodic pattern in the Makyoh image which is easily mistaken for an image of a periodic surface morphology. The characteristic signature of speckles in Makyoh images is determined, thus allowing for its recognition. The effects of speckle on the Makyoh imaging is analysed as a function of surface roughness, illumination coherency and wavelength, light source size and instrumental parameters. It is shown that speckle effects are present even for incoherent illumination because of the coherency enhancement due to the limited source size. The findings are illustrated with experimental images of various semiconductor samples.

Original languageEnglish
Article number012006
JournalJournal of Physics: Conference Series
Volume281
Issue number1
DOIs
Publication statusPublished - Jan 1 2011

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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