Effects of micropatterning and surface modification of microfluidic channels on capillary water transport

E. Holczer, P. Fürjes

Research output: Contribution to journalConference article

3 Citations (Scopus)

Abstract

This work is intended to characterize the fluid conducting behaviour of microcapillary systems containing various 3D microstructures and surface modifying molecular layers. The microchannels are patterned by secondary structures mimicking the natural water-conducting tissue (xylem) of dry-habitat plants. The complex microstructure of the microcapillary system was developed by bulk silicon micromachining technology, applying multistep Deep Reactive Ion Etching (DRIE) to fabricate and pattern the microfluidic channels subsequently. The inner surfaces of the capillary systems were covered by Atomic Layer Deposition (ALD) of different oxide layers to control their wetting properties. We demonstrated that the fluid conducting behaviour of the fabricated capillary systems can be systematically controlled by structural patterning and surface modification of the channels.

Original languageEnglish
Pages (from-to)492-495
Number of pages4
JournalProcedia Engineering
Volume87
DOIs
Publication statusPublished - Jan 1 2014
Event28th European Conference on Solid-State Transducers, EUROSENSORS 2014 - Brescia, Italy
Duration: Sep 7 2014Sep 10 2014

Keywords

  • 3D silicon microstructure
  • Bioinspired autonomous capillary pump system
  • Molecular layer deposition
  • Water conductivity

ASJC Scopus subject areas

  • Engineering(all)

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