Effects of co-depositing oxygen on the growth morphology of (111) and (100) Al single crystal faces in thin films

P. B Barna, F. M Reicha, G. Barcza, L. Gosztola, F. Koltai

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

Corrkation between the growth surface structure and the oxygen-to-aluminium flux ratio was found in vapour deposited Al films. Studies of the effect of co-depositing oxygen species on the growth surface structure were carried out in the case of epitaxially grown Al films (on NaCl, mica and GaAs substrates) containing crystals of (111), (100) and (110) orientations. On (111) crystal faces bunches of growth steps decorated by pinning sites, dents, macro steps correlating to grain boundaries and hillocks were developed. However, on (100) and (110) crystal faces only dents have been found. These results help to explain the correlation between the crystal face anisotropy in the surface micro-chemistry and anisotropy in the participation of oxygen species in the growth mechanism on the various crystal faces. Whiskers and 'mushroom whiskers' were detected in Al films deposited at high level of oxygen contamination on amorphous substrates at first. Their formation can be ascribed also to these phenomena.

Original languageEnglish
Pages (from-to)25-30
Number of pages6
JournalVacuum
Volume33
Issue number1-2
DOIs
Publication statusPublished - 1983

Fingerprint

Single crystals
Oxygen
Thin films
Crystals
single crystals
oxygen
Crystal whiskers
thin films
crystals
Surface structure
Anisotropy
anisotropy
Mica
Substrates
mica
Aluminum
Crystal orientation
Macros
Grain boundaries
contamination

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Effects of co-depositing oxygen on the growth morphology of (111) and (100) Al single crystal faces in thin films. / B Barna, P.; M Reicha, F.; Barcza, G.; Gosztola, L.; Koltai, F.

In: Vacuum, Vol. 33, No. 1-2, 1983, p. 25-30.

Research output: Contribution to journalArticle

B Barna, P. ; M Reicha, F. ; Barcza, G. ; Gosztola, L. ; Koltai, F. / Effects of co-depositing oxygen on the growth morphology of (111) and (100) Al single crystal faces in thin films. In: Vacuum. 1983 ; Vol. 33, No. 1-2. pp. 25-30.
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AU - Koltai, F.

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