Effect of surface topography on scanning RBS microbeam measurements

A. Simon, F. Pászti, I. Uzonyi, A. Manuaba, Á Z. Kiss

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Scanning Rutherford Backscattering Spectrometry (RBS) microprobe in the standard large angle backscattering geometry is not sensitive for the surface topography of samples consisting of homogeneous material. Whereas moving the detector into grazing exit angle the surface irregularities will be enhanced since surface elevations absorb the backscattered ions casting shadows on RBS mapping images ; slopes and edges facing the detector emit ions with decreased energy loss increasing in this way the yield for those positions. In such a way the scanning RBS microprobe will be capable of studying surface topography. Examples for test Si samples will be presented and observed effects are discussed. The method can also be used for the determination of the depth of ditches.

Original languageEnglish
Pages (from-to)503-506
Number of pages4
JournalVacuum
Volume50
Issue number3-4
DOIs
Publication statusPublished - Jul 1 1998

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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