Effect of ion irradiation on the optical properties and room temperature oxidation of copper surface

L. V. Poperenko, Essam Ramadan Shaaban, N. Q. Khánh, V. S. Stashchuk, M. V. Vinnichenko, I. V. Yurgelevich, D. V. Nosach, T. Lohner

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Ex situ and in situ spectroellipsometric investigation of room temperature oxidation of ion-implanted copper surface was performed. The ellipsometer is capable to measure simultaneously the ellipsometric parameters Ψ and Δ at 88 different wavelength values in the range of 280-760 nm within a few minutes in the high precision operation mode using two zone averaging and within a fraction of a second in the one zone operation mode. The native oxide layer formed earlier on the surface of the copper was sputtered off during the aluminum ion implantation. In situ study of the growth of the newly formed native oxide layer on the ion implanted surface was carried out. Ion beam analytical measurements were performed to gain further information on the native oxide layer. The absolute number of the oxygen atoms in the native copper oxide layer was determined. The depth distribution of the implanted aluminum was extracted from Rutherford backscattering spectra. It is found that Al implantation enhanced the oxidation resistance.

Original languageEnglish
Pages (from-to)453-456
Number of pages4
JournalThin Solid Films
Volume455-456
DOIs
Publication statusPublished - May 1 2004

Fingerprint

Ion bombardment
ion irradiation
Oxides
Copper
Optical properties
Aluminum
optical properties
copper
Oxidation
oxidation
room temperature
Ions
oxides
Copper oxides
Rutherford backscattering spectroscopy
Oxidation resistance
aluminum
Ion implantation
Temperature
Ion beams

Keywords

  • Copper
  • Ellipsometry
  • Ion beam analysis
  • Ion implantation

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Poperenko, L. V., Shaaban, E. R., Khánh, N. Q., Stashchuk, V. S., Vinnichenko, M. V., Yurgelevich, I. V., ... Lohner, T. (2004). Effect of ion irradiation on the optical properties and room temperature oxidation of copper surface. Thin Solid Films, 455-456, 453-456. https://doi.org/10.1016/j.tsf.2004.01.013

Effect of ion irradiation on the optical properties and room temperature oxidation of copper surface. / Poperenko, L. V.; Shaaban, Essam Ramadan; Khánh, N. Q.; Stashchuk, V. S.; Vinnichenko, M. V.; Yurgelevich, I. V.; Nosach, D. V.; Lohner, T.

In: Thin Solid Films, Vol. 455-456, 01.05.2004, p. 453-456.

Research output: Contribution to journalArticle

Poperenko, LV, Shaaban, ER, Khánh, NQ, Stashchuk, VS, Vinnichenko, MV, Yurgelevich, IV, Nosach, DV & Lohner, T 2004, 'Effect of ion irradiation on the optical properties and room temperature oxidation of copper surface', Thin Solid Films, vol. 455-456, pp. 453-456. https://doi.org/10.1016/j.tsf.2004.01.013
Poperenko LV, Shaaban ER, Khánh NQ, Stashchuk VS, Vinnichenko MV, Yurgelevich IV et al. Effect of ion irradiation on the optical properties and room temperature oxidation of copper surface. Thin Solid Films. 2004 May 1;455-456:453-456. https://doi.org/10.1016/j.tsf.2004.01.013
Poperenko, L. V. ; Shaaban, Essam Ramadan ; Khánh, N. Q. ; Stashchuk, V. S. ; Vinnichenko, M. V. ; Yurgelevich, I. V. ; Nosach, D. V. ; Lohner, T. / Effect of ion irradiation on the optical properties and room temperature oxidation of copper surface. In: Thin Solid Films. 2004 ; Vol. 455-456. pp. 453-456.
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AU - Vinnichenko, M. V.

AU - Yurgelevich, I. V.

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