Effect of gas adsorption on the surface structure of β-Ga2O3 studied by XPS and conductivity measurements

K. Josepovits, O. Krafcsik, G. Kiss, I. V. Perczel

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

In this work the mechanism of oxygen adsorption on n-type β-Ga2O3 oxide semiconductor-examined in large temperature range - is discussed based on the results of XPS and electric conductivity measurements. On one hand the effect of the adsorbed charged particles was investigated on the conductivity of the semiconductor layer, while on the other hand on the core level binding energy of oxygen and gallium. According to the former SIMS (Secondary Ion Mass Spectrometry) results the potential barrier of the depletion layer caused by the adsorbed negative ions on the surface is so high that it hinders the formation of negative secondary ions in the 450-650°C temperature range. The present results suggest the dominance of O- ion adsorption compared with that of O2- ions. The adsorption properties of β-Ga2O3 were also examined at lower temperatures (20-200°C).

Original languageEnglish
Pages (from-to)373-375
Number of pages3
JournalSensors and Actuators, B: Chemical
Volume48
Issue number1-3
Publication statusPublished - May 30 1998

Fingerprint

Gas adsorption
Surface structure
X ray photoelectron spectroscopy
Ions
Adsorption
conductivity
adsorption
Electric conductivity measurement
gases
Oxygen
ions
Gallium
Core levels
oxygen
Charged particles
Secondary ion mass spectrometry
Binding energy
negative ions
Temperature
secondary ion mass spectrometry

Keywords

  • β-gaO
  • Conductivity measurements
  • Gas adsorption

ASJC Scopus subject areas

  • Analytical Chemistry
  • Electrochemistry
  • Electrical and Electronic Engineering

Cite this

Effect of gas adsorption on the surface structure of β-Ga2O3 studied by XPS and conductivity measurements. / Josepovits, K.; Krafcsik, O.; Kiss, G.; Perczel, I. V.

In: Sensors and Actuators, B: Chemical, Vol. 48, No. 1-3, 30.05.1998, p. 373-375.

Research output: Contribution to journalArticle

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