Dynamics of excimer laser ablation of thin tungsten films monitored by ultrafast photography

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36 Citations (Scopus)

Abstract

The time course of laser light induced transport of tungsten films from a glass support is followed by ultrafast photography using delayed dye laser pulses. The photographs provide unambiguous evidence that the material transport in the 40-200 mJ/cm2 intensity domain takes place via removal of solid pieces from the film material. These results are consistent with heat flow calculations which predict the overall melting of the metal layer above 380 mJ/cm2. The series of photographs presented give detailed insight into the melting process and have revealed an unexpected in-flight phase separation of solid fracture pieces and molten droplets throughout the 200-900 mJ/cm2 domain. The faster propagating molten droplets form a condensed halo in front of the solid pieces, thereby providing an efficient shield between the processing laser light and the solid phase.

Original languageEnglish
Pages (from-to)431-436
Number of pages6
JournalApplied Physics A: Materials Science and Processing
Volume60
Issue number5
DOIs
Publication statusPublished - May 1995

Fingerprint

Tungsten
photography
Photography
Excimer lasers
Laser ablation
excimer lasers
laser ablation
tungsten
photographs
melting
Molten materials
Melting
heat transmission
dye lasers
lasers
Dye lasers
solid phases
Lasers
halos
flight

Keywords

  • 42.60
  • 78.90

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)
  • Materials Science(all)
  • Engineering(all)

Cite this

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abstract = "The time course of laser light induced transport of tungsten films from a glass support is followed by ultrafast photography using delayed dye laser pulses. The photographs provide unambiguous evidence that the material transport in the 40-200 mJ/cm2 intensity domain takes place via removal of solid pieces from the film material. These results are consistent with heat flow calculations which predict the overall melting of the metal layer above 380 mJ/cm2. The series of photographs presented give detailed insight into the melting process and have revealed an unexpected in-flight phase separation of solid fracture pieces and molten droplets throughout the 200-900 mJ/cm2 domain. The faster propagating molten droplets form a condensed halo in front of the solid pieces, thereby providing an efficient shield between the processing laser light and the solid phase.",
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T1 - Dynamics of excimer laser ablation of thin tungsten films monitored by ultrafast photography

AU - Tóth, Z.

AU - Hopp, B.

AU - Kántor, Z.

AU - Ignácz, F.

AU - Szörényi, T.

AU - Bor, Z.

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AB - The time course of laser light induced transport of tungsten films from a glass support is followed by ultrafast photography using delayed dye laser pulses. The photographs provide unambiguous evidence that the material transport in the 40-200 mJ/cm2 intensity domain takes place via removal of solid pieces from the film material. These results are consistent with heat flow calculations which predict the overall melting of the metal layer above 380 mJ/cm2. The series of photographs presented give detailed insight into the melting process and have revealed an unexpected in-flight phase separation of solid fracture pieces and molten droplets throughout the 200-900 mJ/cm2 domain. The faster propagating molten droplets form a condensed halo in front of the solid pieces, thereby providing an efficient shield between the processing laser light and the solid phase.

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