The dynamic optical distortion in a KrF amplifier was measured using a Sagnac interferometer. Maximum wavefront aberration at 249 nm was λ/3 using helium buffer gas, indicating the potential for transmitted beams very close to the diffraction limit.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering