Direct surface patterning of homogeneous and nanostructured chalcogenide layers

Viktor Takats, Floyd Miller, Himanshu Jain, Csaba Cserhati, Sandor Kokenyesi

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7 Citations (Scopus)


Investigations of direct one-step optical recording of surface optical and geometrical patterns in homogeneous and nanostructured chalcogenide layers were extended towards e-beam recording. Our aim was to establish the common features of the two processes, and to develop some optimum materials for prototypic micro- and nanosized elements for optoelectronics. Experiments were conducted on Se/As2S3 and Sb/As2S3 nanolayered structures (NLS) as well as on uniform Se, Sb and As2S3 layers. Both green laser light (λ = 535 nm) and e-beam (5-20 pA, 10-30 keV) induced bleaching in all NLS. The optical change was more efficient in Sb-containing NLS. In contrast, volume expansion occurred only in chalcogenide-chalcogenide NLS and the homogeneous Se or As2S3 layers. Its magnitude was larger for the NLS (Δd /d ≥10%); no volume change was detected in Sb layer. A comparison of the two types of recording revealed the role of interdiffusion and induced free volume aggregation in a giant relief formation under the increased fluidity conditions. It was shown that these effects could be used to fabricate micro lenses, amplitude-phase optical modulating and guiding elements.

Original languageEnglish
Pages (from-to)S83-S85
JournalPhysica Status Solidi (C) Current Topics in Solid State Physics
Issue numberSUPPL. 1
Publication statusPublished - Dec 1 2009

ASJC Scopus subject areas

  • Condensed Matter Physics

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