Direct laser ablation of sub-100 nm line structures into polyimide

H. M. Phillips, D. L. Callahan, R. Sauerbrey, G. Szabo, Z. Bor

Research output: Contribution to journalArticle

48 Citations (Scopus)

Abstract

Periodic line structures with a period of 167 nm and linewidths varying from 30 to 100 nm have been produced in polyimide by direct ablation with a KrF laser using an interferometric technique. The characteristics of this interferometer as it applies to the ablation of these line structures, including linewidth and alignment sensitivity, are analyzed. The ability to control the linewidth by varying the average incident fluence is described theoretically and demonstrated experimentally. This externally generated period of 167 nm also prevents the spontaneous growth of laser induced periodic surface structures (LIPSS).

Original languageEnglish
Pages (from-to)158-165
Number of pages8
JournalApplied Physics A Solids and Surfaces
Volume54
Issue number2
DOIs
Publication statusPublished - Feb 1 1992

Keywords

  • 07.60.Ly
  • 81.60.Jw

ASJC Scopus subject areas

  • Materials Science(all)
  • Engineering(all)
  • Physics and Astronomy (miscellaneous)

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