Direct formation of high aspect ratio multiple tilted micropillar array in liquid phase PDMS by proton beam writing

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Abstract

Abstract High aspect ratio (HAR), straight and tilted micropillars were fabricated in PDMS polymer by proton beam writing (PBW) method. The polymer was applied as a negative tone resist material, in its liquid and high viscosity form. The microstructures were created by irradiating the polymer with 2 MeV focused proton beam, by which, the irradiated area became cross-linked and solid. The formed micropillars had very smooth side walls and they were stable against the capillary and adhesion forces, above a certain applied proton fluence. The rate of the solidification strongly depends on the deposited ion fluence. Furthermore, some physicochemical properties, such as elastic modulus also significantly change due to ion irradiation induced processes. This liquid PDMS resist with PBW makes the possibility to create high aspect ratio, straight or even tilted micropillar arrays with tunable properties, which can be useful in many potential applications, like lab-on-a-chip devices, high surface required applications, catalysis, biomedical applications, cell separation, and directional adhesive surfaces.

Original languageEnglish
Article number6956
Pages (from-to)396-402
Number of pages7
JournalEuropean Polymer Journal
Volume69
DOIs
Publication statusPublished - Jun 27 2015

Fingerprint

Proton beams
high aspect ratio
proton beams
Aspect ratio
Polymers
liquid phases
fluence
polymers
Liquids
lab-on-a-chip devices
Lab-on-a-chip
liquids
Ion bombardment
ion irradiation
adhesives
Catalysis
solidification
catalysis
Solidification
Protons

Keywords

  • Liquid phase resist
  • Micropillar arrays
  • PDMS
  • Proton beam writing
  • Tilted and multiple micropillars

ASJC Scopus subject areas

  • Polymers and Plastics
  • Physics and Astronomy(all)
  • Organic Chemistry

Cite this

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title = "Direct formation of high aspect ratio multiple tilted micropillar array in liquid phase PDMS by proton beam writing",
abstract = "Abstract High aspect ratio (HAR), straight and tilted micropillars were fabricated in PDMS polymer by proton beam writing (PBW) method. The polymer was applied as a negative tone resist material, in its liquid and high viscosity form. The microstructures were created by irradiating the polymer with 2 MeV focused proton beam, by which, the irradiated area became cross-linked and solid. The formed micropillars had very smooth side walls and they were stable against the capillary and adhesion forces, above a certain applied proton fluence. The rate of the solidification strongly depends on the deposited ion fluence. Furthermore, some physicochemical properties, such as elastic modulus also significantly change due to ion irradiation induced processes. This liquid PDMS resist with PBW makes the possibility to create high aspect ratio, straight or even tilted micropillar arrays with tunable properties, which can be useful in many potential applications, like lab-on-a-chip devices, high surface required applications, catalysis, biomedical applications, cell separation, and directional adhesive surfaces.",
keywords = "Liquid phase resist, Micropillar arrays, PDMS, Proton beam writing, Tilted and multiple micropillars",
author = "R. Husz{\'a}nk and I. Rajta and C. Cserh{\'a}ti",
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TY - JOUR

T1 - Direct formation of high aspect ratio multiple tilted micropillar array in liquid phase PDMS by proton beam writing

AU - Huszánk, R.

AU - Rajta, I.

AU - Cserháti, C.

PY - 2015/6/27

Y1 - 2015/6/27

N2 - Abstract High aspect ratio (HAR), straight and tilted micropillars were fabricated in PDMS polymer by proton beam writing (PBW) method. The polymer was applied as a negative tone resist material, in its liquid and high viscosity form. The microstructures were created by irradiating the polymer with 2 MeV focused proton beam, by which, the irradiated area became cross-linked and solid. The formed micropillars had very smooth side walls and they were stable against the capillary and adhesion forces, above a certain applied proton fluence. The rate of the solidification strongly depends on the deposited ion fluence. Furthermore, some physicochemical properties, such as elastic modulus also significantly change due to ion irradiation induced processes. This liquid PDMS resist with PBW makes the possibility to create high aspect ratio, straight or even tilted micropillar arrays with tunable properties, which can be useful in many potential applications, like lab-on-a-chip devices, high surface required applications, catalysis, biomedical applications, cell separation, and directional adhesive surfaces.

AB - Abstract High aspect ratio (HAR), straight and tilted micropillars were fabricated in PDMS polymer by proton beam writing (PBW) method. The polymer was applied as a negative tone resist material, in its liquid and high viscosity form. The microstructures were created by irradiating the polymer with 2 MeV focused proton beam, by which, the irradiated area became cross-linked and solid. The formed micropillars had very smooth side walls and they were stable against the capillary and adhesion forces, above a certain applied proton fluence. The rate of the solidification strongly depends on the deposited ion fluence. Furthermore, some physicochemical properties, such as elastic modulus also significantly change due to ion irradiation induced processes. This liquid PDMS resist with PBW makes the possibility to create high aspect ratio, straight or even tilted micropillar arrays with tunable properties, which can be useful in many potential applications, like lab-on-a-chip devices, high surface required applications, catalysis, biomedical applications, cell separation, and directional adhesive surfaces.

KW - Liquid phase resist

KW - Micropillar arrays

KW - PDMS

KW - Proton beam writing

KW - Tilted and multiple micropillars

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