Differential pumping scheme for discharge pumped excimer lasers

S. Szatmári, J. Bohus

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

The beam homogeneity and stored energy of discharge pumped excimer amplifiers are critically dependent on the prepulse level of the electric excitation pulse. Here a scheme is presented to decrease significantly the prepulse level by differential charging of the two electrodes. The modified charging circuit also enables to increase the amplitude and improve the rise time of the main pulse, thus improving the discharge quality and the amplification properties of the excimer module. The circuit is especially well suited for short-pulse KrF amplifiers.

Original languageEnglish
Article number045105
JournalReview of Scientific Instruments
Volume77
Issue number4
DOIs
Publication statusPublished - 2006

Fingerprint

Pumping (laser)
Excimer lasers
excimer lasers
Electric excitation
pumping
Pulse amplifiers
excimers
charging
Networks (circuits)
amplifiers
pulses
Amplification
Electrodes
homogeneity
modules
electrodes
excitation
energy

ASJC Scopus subject areas

  • Instrumentation
  • Physics and Astronomy (miscellaneous)

Cite this

Differential pumping scheme for discharge pumped excimer lasers. / Szatmári, S.; Bohus, J.

In: Review of Scientific Instruments, Vol. 77, No. 4, 045105, 2006.

Research output: Contribution to journalArticle

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