Diamond-like carbon films prepared by reactive pulsed laser deposition in hydrogen and methane ambient

Judit Budai, S. Tóth, Z. Tóth, M. Koós

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

The properties of amorphous hydrogenated carbon (a-C:H) films, like their hardness and optical band gap drastically depends on their hydrogen content. By reactive pulsed laser deposition in hydrogen containing gas, the hydrogenation of the films can be achieved. The application of reactive gases of different chemical composition can influence the film properties in a different manner. Therefore, we investigated deposition of a-C:H films in H2 and CH4 atmosphere (0.001-50 Pa). The deposited films were characterized by Raman spectroscopy, spectroscopic ellipsometry and infrared spectroscopy. The optical and structural properties of the films prepared in the two different ambient gas show similarities: at low pressure below 1 Pa, the films are diamond-like, at ∼1-10 Pa, the films become graphite-like and at higher pressures, the films show polymer-like properties. Differences in the films prepared in H2 and CH4 are found in their thickness and infrared absorption. When increasing the pressure up to medium pressures the thicknesses of both series of films increase, and the films become thinner in the highest pressure domain. However, the films prepared in CH4 are ∼1.5 times thicker than the films prepared in H2. Since the mass differences of C atoms and CH4 is small, the CHx radicals are efficiently accelerated by the carbon plasma and are incorporated into the films, too.

Original languageEnglish
Pages (from-to)8220-8225
Number of pages6
JournalApplied Surface Science
Volume253
Issue number19
DOIs
Publication statusPublished - Jul 31 2007

Fingerprint

Diamond like carbon films
Methane
Pulsed laser deposition
pulsed laser deposition
Hydrogen
methane
diamonds
carbon
hydrogen
Gases
Carbon
gases
Graphite
Spectroscopic ellipsometry
Diamond films
Optical band gaps
Infrared absorption
Polymer films
diamond films
Hydrogenation

Keywords

  • Carbon film
  • Plasma-gas interaction
  • PLD

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Surfaces, Coatings and Films
  • Condensed Matter Physics

Cite this

Diamond-like carbon films prepared by reactive pulsed laser deposition in hydrogen and methane ambient. / Budai, Judit; Tóth, S.; Tóth, Z.; Koós, M.

In: Applied Surface Science, Vol. 253, No. 19, 31.07.2007, p. 8220-8225.

Research output: Contribution to journalArticle

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