Diagnostic research of plasmas generated by a 14.5 GHz ECR ion source using Langmuir-probe

L. Kenéz, S. Biri, J. Karácsony, A. Valek, T. Nakagawa, K. E. Stiebing, V. Mironov

Research output: Contribution to journalConference article

12 Citations (Scopus)
Original languageEnglish
Number of pages1
JournalReview of Scientific Instruments
Issue number2 II
Publication statusPublished - Feb 1 2002
EventProceedings of the 9th International Conference on ION Sources - Oakland, CA, United States
Duration: Sep 3 2001Sep 7 2001

ASJC Scopus subject areas

  • Instrumentation

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