Determination of the thickness and optical constants of thin films from transmission spectra

M. Kubinyi, N. Benkö, A. Grofcsik, W. Jeremy Jones

Research output: Contribution to journalArticle

39 Citations (Scopus)


A method has been developed to determine the thickness and the wavelength-dependent refractive indices and absorption coefficients of thin optical films by fitting a five parameter function to measured transmission spectra. Initial values for the fitting parameters are obtained from the transmission values at the spectral maxima and minima of the interference patterns created by the films. This is followed by a systematic variation of those parameters which can cause a failure of the calculation by reaching local minima of the residual sum of squares. The final fitting is performed with a Marquardt algorithm. A Monte Carlo simulation has indicated that the accuracy of this method is at least one order of magnitude better than that of the methods utilising only the interference extrema.

Original languageEnglish
Pages (from-to)164-169
Number of pages6
JournalThin Solid Films
Issue number1-2
Publication statusPublished - Sep 30 1996



  • Amorphous materials
  • Optical properties
  • Optical spectroscopy
  • Silicon

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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