Determination of the mean free path of electrons in solids from the elastic peak - II. Experimental results

G. Gergely, M. Menyhárd, A. Sulyok, A. Jablonski, P. Mrozek

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Abstract

The simple theoretical model described in Part I [1] is applied to evaluate experimental results determined by elastic peak electron spectroscopy and published previously. The inelastic mean free path λ determined from the elastic backscattering probability Pe of 2.2 and 3.1 keV electrons on C, Si, Ge and Mo are in reasonable agreement with results of Seah and Penn. In the evaluation σeff elastic backscattering cross sections calculated with the Thomas-Fermi-Dirac potential model have been applied. This model, however, is not suitable for W and Au high atomic number elements. A detailed discussion is given on the problems associated with the measurement of Pe taking into consideration the CMA response, deconvolution and angular distribution of electron spectra. Another method for determining λ is given by comparing the elastic peaks of two elements and their σeff backscattering cross sections. Experimental results are presented for Al, Si, Ge, GaAs, GaP, InSb, GaSb, Sb, InP, SiO2 and Si3N4, atomic clean surfaces measured with a CMA at EP=1, 1.5, 2 and 3 keV at normal incidence. Good agreement was found with literature data collected by Ashley for Al-Si, Ge-GaAs. The IMPF λ of GaP and GaSb proved to be 10% larger than those of GaAs, results not available in the literature. New results as well are published for λ of Sb, InSb and InP. The good agreement with literature data justifies the application of the simplified model described in Part I.

Original languageEnglish
Pages (from-to)139-147
Number of pages9
JournalActa Physica Hungarica
Volume57
Issue number1-2
DOIs
Publication statusPublished - Mar 1985

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mean free path
backscattering
electrons
cross sections
electron spectroscopy
angular distribution
incidence
evaluation

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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Determination of the mean free path of electrons in solids from the elastic peak - II. Experimental results. / Gergely, G.; Menyhárd, M.; Sulyok, A.; Jablonski, A.; Mrozek, P.

In: Acta Physica Hungarica, Vol. 57, No. 1-2, 03.1985, p. 139-147.

Research output: Contribution to journalArticle

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