### Abstract

The inelastic mean free path λ of electrons is an important material parameter for quantitative AES and EELS. Instead of the usual methods, requiring a very delicate sample preparation procedure, λ can be determined by elastic peak electron spectroscopy. Beside geometrical parameters, the elastic peak is given by the product of λ and σ_{eff} backscattering cross section. A simple method is described for evaluating experimental elastic backscattering probability results using theoretical σ_{eff} data. σ_{eff} was calculated by integrating the differential electron scattering cross sections assuming a single scattering process and using three types of the atomic potential: the Thomas-Fermi, the Thomas-Fermi-Dirac and the Hartree-Fock models. Tabulated {Mathematical expression} data are presented for the Z=2-50 atomic number and E_{p}=1, 1.5, 2, 2.5 and 3 keV energy ranges. No significant differences were found with these potential models, as well as with those based on Fink's data obtained by computer solution of the Dirac equation. Our tabulated σ_{eff} data complete Fink's works restricted to E_{p}>-1.5 keV and to some elements. Our model is extended to compounds and alloys.

Original language | English |
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Pages (from-to) | 131-138 |

Number of pages | 8 |

Journal | Acta Physica Hungarica |

Volume | 57 |

Issue number | 1-2 |

DOIs | |

Publication status | Published - Mar 1 1985 |

### ASJC Scopus subject areas

- Physics and Astronomy(all)

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## Cite this

*Acta Physica Hungarica*,

*57*(1-2), 131-138. https://doi.org/10.1007/BF03155857