Determination of the mean free path of electrons in solids from the elastic peak - I. A simplified theoretical approach

A. Jablonski, P. Mrozek, G. Gergely, M. Menyhárd, A. Sulyok

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Abstract

The inelastic mean free path λ of electrons is an important material parameter for quantitative AES and EELS. Instead of the usual methods, requiring a very delicate sample preparation procedure, λ can be determined by elastic peak electron spectroscopy. Beside geometrical parameters, the elastic peak is given by the product of λ and σeff backscattering cross section. A simple method is described for evaluating experimental elastic backscattering probability results using theoretical σeff data. σeff was calculated by integrating the differential electron scattering cross sections assuming a single scattering process and using three types of the atomic potential: the Thomas-Fermi, the Thomas-Fermi-Dirac and the Hartree-Fock models. Tabulated {Mathematical expression} data are presented for the Z=2-50 atomic number and Ep=1, 1.5, 2, 2.5 and 3 keV energy ranges. No significant differences were found with these potential models, as well as with those based on Fink's data obtained by computer solution of the Dirac equation. Our tabulated σeff data complete Fink's works restricted to Ep>-1.5 keV and to some elements. Our model is extended to compounds and alloys.

Original languageEnglish
Pages (from-to)131-138
Number of pages8
JournalActa Physica Hungarica
Volume57
Issue number1-2
DOIs
Publication statusPublished - Mar 1 1985

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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