DETERMINATION OF Na CONTENT OF MOS OXIDE LAYERS BY MEANS OF COMBINED SIMS AND BT INVESTIGATIONS.

Denes Marton, I. Bársony, Janos Giber

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Abstract

Combined SIMS and electrical (BT) measurements were applied to analyse the Na content of thin MOS oxides. The evaluation elaborated here provides quantitative data and both surface and volume concentrations were determined. The accumulation of sodium on the Si-SiO//2 interface can be interpreted by the thermodynamical theory of surfaces applied to this case. There is a good qualitative agreement between the theoretical and measured accumulation ratios.

Original languageEnglish
Pages (from-to)15-21
Number of pages7
JournalPeriodica Polytechnica: Chemical Engineering
Volume25
Issue number1
Publication statusPublished - 1981

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Secondary ion mass spectrometry
Oxides
Sodium

ASJC Scopus subject areas

  • Engineering(all)

Cite this

DETERMINATION OF Na CONTENT OF MOS OXIDE LAYERS BY MEANS OF COMBINED SIMS AND BT INVESTIGATIONS. / Marton, Denes; Bársony, I.; Giber, Janos.

In: Periodica Polytechnica: Chemical Engineering, Vol. 25, No. 1, 1981, p. 15-21.

Research output: Contribution to journalArticle

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