Detection of reducing gases in air by β-Ga2O3 thin films using self-heated and externally (oven-) heated operation modes

F. Reti, M. Fleischer, H. Meixner, J. Giber

Research output: Contribution to conferencePaper

1 Citation (Scopus)

Abstract

Applying the self-heated mode, the whole amount of reducing gas to be detected reaches the sensor surface. The response of the sensor - the resistance decrease - is proportional to the concentration of the respective gas. However, using the oven-heating mode, part of the reducing gas to be detected is already oxidized in the hot gas phase. As the sensor meets a diminished gas concentration, its response is a smaller resistance change.

Original languageEnglish
Pages854-857
Number of pages4
Publication statusPublished - Dec 1 1995
EventProceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden
Duration: Jun 25 1995Jun 29 1995

Other

OtherProceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)
CityStockholm, Sweden
Period6/25/956/29/95

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ASJC Scopus subject areas

  • Engineering(all)

Cite this

Reti, F., Fleischer, M., Meixner, H., & Giber, J. (1995). Detection of reducing gases in air by β-Ga2O3 thin films using self-heated and externally (oven-) heated operation modes. 854-857. Paper presented at Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), Stockholm, Sweden, .