Detection of deeply buried thin oxide layer by means of Auger depth profiling

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3 Citations (Scopus)

Abstract

Using our dedicated Auger depth profiling device (applying a grazing angle of incidence 84° and low ion energy 1 keV of Ar and specimen rotation), we could detect a thin oxide layer buried by about a 180 nm thick layer. Due to the good depth resolution achieved, the oxide layer could be localized to the interface. The oxide layer thickness was determined for two independent specimens to be about 2 and 3 ML.

Original languageEnglish
Pages (from-to)2847-2849
Number of pages3
JournalReview of Scientific Instruments
Volume68
Issue number7
DOIs
Publication statusPublished - Jul 1997

ASJC Scopus subject areas

  • Instrumentation

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