Design of a new vacuum deposition specimen holder for an electron microscope operating at 10-8 torr

A. Barna, PB Barna, JF Pócza

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Abstract

The authors have developed a specimen holder for in situ vacuum deposition of thin films in the pressure region of 10-8 torr. Substrate temperatures can be measured to ±4°C over a range of -150°C to +400°C. The residual pressure can be measured during operation by a cold-cathode ionization vacuum gauge in the vicinity of the specimen. UHV is achieved by surrounding the specimen with a cooled cartridge pumped by the gauge working as a getter ion pump.

Original languageEnglish
Pages (from-to)219-221
Number of pages3
JournalVacuum
Volume17
Issue number4
DOIs
Publication statusPublished - Apr 1967

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ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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