Design, Ion beam fabrication and test of integrated optical elements

I. Bányász, S. Pelli, G. Nunzi-Conti, G. C. Righini, S. Berneschi, E. Szilágyi, A. Németh, M. Fried, P. Petrik, E. Agócs, B. Kalas, Z. Zolnai, N. Q. Khanh, I. Rajta, G. U.L. Nagy, V. Havranek, V. Vosecek, M. Veres, L. Himics

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Various methods, based on the use of ion beams, were used for the fabrication of planar and channel optical waveguides and Bragg gratings in optical crystals and glasses. Some examples of the results of these researches are presented in this review. Researches were initiated on ion beam fabrication of planar and channel optical waveguides in tellurite glasses. The ions used in the experiments were mainly helium, carbon, nitrogen and oxygen. In case of the two dimensional elements, like channel waveguides, both masked ion implantation and direct writing with ion microbeam were used. Optical microscopy (phase contrast, interference and interference contrast (INTERPHAKO), spectroscopic ellipsometry, m-line spectroscopy, Rutherford Backscattering and micro Raman spectroscopy were used to test the integrated optical elements.

Original languageEnglish
Title of host publicationPHOTOPTICS 2018 - Proceedings of the 6th International Conference on Photonics, Optics and Laser Technology
EditorsMaria Raposo, Paulo A. Ribeiro
PublisherSciTePress
Pages279-285
Number of pages7
ISBN (Electronic)9789897582868
DOIs
Publication statusPublished - 2017
Event6th International Conference on Photonics, Optics and Laser Technology, PHOTOPTICS 2018 - Funchal, Madeira, Portugal
Duration: Jan 25 2018Jan 27 2018

Publication series

NamePHOTOPTICS 2018 - Proceedings of the 6th International Conference on Photonics, Optics and Laser Technology
Volume2017-January

Other

Other6th International Conference on Photonics, Optics and Laser Technology, PHOTOPTICS 2018
CountryPortugal
CityFunchal, Madeira
Period1/25/181/27/18

Keywords

  • Integrated Optics
  • Ion Implantation
  • M-Line Spectroscopy
  • Micro Raman Spectroscopy
  • Optical Channel Waveguide
  • Optical Grating
  • Optical Planar Waveguide
  • Rutherford Backscattering
  • Spectroscopic Ellipsometry

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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  • Cite this

    Bányász, I., Pelli, S., Nunzi-Conti, G., Righini, G. C., Berneschi, S., Szilágyi, E., Németh, A., Fried, M., Petrik, P., Agócs, E., Kalas, B., Zolnai, Z., Khanh, N. Q., Rajta, I., Nagy, G. U. L., Havranek, V., Vosecek, V., Veres, M., & Himics, L. (2017). Design, Ion beam fabrication and test of integrated optical elements. In M. Raposo, & P. A. Ribeiro (Eds.), PHOTOPTICS 2018 - Proceedings of the 6th International Conference on Photonics, Optics and Laser Technology (pp. 279-285). (PHOTOPTICS 2018 - Proceedings of the 6th International Conference on Photonics, Optics and Laser Technology; Vol. 2017-January). SciTePress. https://doi.org/10.5220/0006679002790285