Design and verification of an electrostatic MEMS simulator

V. Székely, G. Bognár, M. Rencz, F. Ciontu, B. Charlot, B. Courtois

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

In this paper we introduce algorithmic extensions to thermal simulators in order to fit them also for electrostatic simulation. The advantage is the simplicity and the speed of this kind of simulation. We present the algorithm of calculating the forces in details. The algorithm is verified with results measured on a MEMS structure. An electrostatic comb drive was designed, fabricated and measured. The comparisons of the measured and simulated results demonstrate the applicability of the simulation method in addition to presenting a way for the electrostatic characterization of comb drives by measurements.

Original languageEnglish
Title of host publication2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004
EditorsM. Laudon, B. Romanowicz
Pages490-493
Number of pages4
Volume2
Publication statusPublished - 2004
Event2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004 - Boston, MA, United States
Duration: Mar 7 2004Mar 11 2004

Other

Other2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004
CountryUnited States
CityBoston, MA
Period3/7/043/11/04

Fingerprint

MEMS
Electrostatics
Simulators
Hot Temperature

Keywords

  • Calculation of forces
  • Comb drives
  • Electrostatic simulation
  • MEMS characterization
  • MEMS simulation

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Székely, V., Bognár, G., Rencz, M., Ciontu, F., Charlot, B., & Courtois, B. (2004). Design and verification of an electrostatic MEMS simulator. In M. Laudon, & B. Romanowicz (Eds.), 2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004 (Vol. 2, pp. 490-493)

Design and verification of an electrostatic MEMS simulator. / Székely, V.; Bognár, G.; Rencz, M.; Ciontu, F.; Charlot, B.; Courtois, B.

2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004. ed. / M. Laudon; B. Romanowicz. Vol. 2 2004. p. 490-493.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Székely, V, Bognár, G, Rencz, M, Ciontu, F, Charlot, B & Courtois, B 2004, Design and verification of an electrostatic MEMS simulator. in M Laudon & B Romanowicz (eds), 2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004. vol. 2, pp. 490-493, 2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004, Boston, MA, United States, 3/7/04.
Székely V, Bognár G, Rencz M, Ciontu F, Charlot B, Courtois B. Design and verification of an electrostatic MEMS simulator. In Laudon M, Romanowicz B, editors, 2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004. Vol. 2. 2004. p. 490-493
Székely, V. ; Bognár, G. ; Rencz, M. ; Ciontu, F. ; Charlot, B. ; Courtois, B. / Design and verification of an electrostatic MEMS simulator. 2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004. editor / M. Laudon ; B. Romanowicz. Vol. 2 2004. pp. 490-493
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