Derivation of surface macroroughness parameters of a random rough surface from an optical interferometric measurement

M. Gyimesi, P. Richter, E. Lörincz

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

A new technique for the measurement of surface roughness based on the intensity fluctuations of laser light backscattered from a movingsurface has been introduced. Using a statisticalmodel describing surface macroroughness, the possibility of parameters is investigated.

Original languageEnglish
Pages (from-to)983-986
Number of pages4
JournalApplied Optics
Volume27
Issue number5
DOIs
Publication statusPublished - 1988

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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