Deposition of micrometer-sized tungsten patterns by laser transfer technique

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Abstract

A simple single-step technique for surface patterning is presented. It is shown that well-adhering micrometer-sized patterns of 100% coverage preserving the shape and dimensions of the ablated area can be deposited by ablating and transferring tungsten thin films in the form of single solid pieces using single pulses of peak power up to 100 mW and 100 μs-1 ms duration from a diode-pumped YAG laser.

Original languageEnglish
Pages (from-to)3506-3508
Number of pages3
JournalApplied Physics Letters
Volume64
Issue number25
DOIs
Publication statusPublished - Dec 1 1994

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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