Depolarization correction method for ellipsometric measurements of large grain size zinc-oxide films

Z. Pápa, J. Budai, I. Hanyecz, J. Csontos, Z. Toth

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

A method allowing for the separation of scattering-caused depolarization from depolarization due to film thickness inhomogeneity on isotropic samples is presented. Mueller-matrix analysis shows that M22 matrix-element is correlated with the scattering-caused depolarization, and correction of the measured depolarization spectra with M22 element excludes this type of depolarization from the spectra. Ellipsometric measurements performed on polycrystalline ZnO samples with smooth and scattering surface, with uniform and non-uniform layer thickness in every possible combination confirm the suggested method. Besides depolarization, ellipsometric analysis and optical properties of the ZnO films are discussed.

Original languageEnglish
Pages (from-to)562-566
Number of pages5
JournalThin Solid Films
Volume571
Issue numberP3
DOIs
Publication statusPublished - Nov 28 2014

Keywords

  • Depolarization
  • Ellipsometry
  • Pulsed laser deposition
  • Rough surfaces
  • ZnO

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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