The columnar structure in obliquely evaporated amorphous SiOx layers was investigated by cross-sectional transmission electron microscopy (TEM). Samples for TEM were prepared by grazing incident ion-beam thinning of cross-sectional slices. On increasing the angle of evaporation a change from a well-defined columnar structure to a striated structure was observed. The angle between columns and surface increased both with increasing angle of evaporation and with decreasing rate of condensation.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Ceramics and Composites
- Condensed Matter Physics
- Materials Chemistry