Dependence of the columnar structure of obliquely evaporated SiOx thin films on the angle of deposition and the rate of condensation

Olga Geszti, László Gosztola, Éva Seyfried{

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

The columnar structure in obliquely evaporated amorphous SiOx layers was investigated by cross-sectional transmission electron microscopy (TEM). Samples for TEM were prepared by grazing incident ion-beam thinning of cross-sectional slices. On increasing the angle of evaporation a change from a well-defined columnar structure to a striated structure was observed. The angle between columns and surface increased both with increasing angle of evaporation and with decreasing rate of condensation.

Original languageEnglish
Pages (from-to)315-318
Number of pages4
JournalJournal of Non-Crystalline Solids
Volume90
Issue number1-3
DOIs
Publication statusPublished - Feb 1987

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Condensed Matter Physics
  • Materials Chemistry

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