Dependence of nitrogen content and deposition rate on nitrogen pressure and laser parameters in ArF excimer laser deposition of carbon nitride films

T. Szörényi, F. Antoni, E. Fogarassy, I. Bertóti

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

The effect of N2 pressure and laser fluence on the chemical composition and growth rate of CNx (0.072 pressures differ not only in their (average) nitrogen but also in their oxygen content. The chemical composition of the films deposited using pulses of fluences between 0.7 and 2 J cm-2 remains the same within experimental error, while in the 2-10 J cm-2 domain the nitrogen incorporation steeply increases. The growth rates vary from 0.003 to 0.56 angstroms/pulse, increasing linearly with fluence and decreasing with increasing pressure in the 0.7-2 J cm-2 fluence domain, while followed by a supralinear dependence on fluence and less sensitivity to N2 pressure at higher fluences. Changes in film porosity account for the striking features reported.

Original languageEnglish
Pages (from-to)248-250
Number of pages3
JournalApplied Surface Science
Volume168
Issue number1-4
DOIs
Publication statusPublished - Dec 15 2000

Fingerprint

laser deposition
carbon nitrides
Carbon nitride
Excimer lasers
Deposition rates
excimer lasers
fluence
Nitrogen
nitrogen
Lasers
lasers
chemical composition
Chemical analysis
Porosity
Oxygen
pulses
cyanogen
porosity
sensitivity
oxygen

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Surfaces, Coatings and Films
  • Condensed Matter Physics

Cite this

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abstract = "The effect of N2 pressure and laser fluence on the chemical composition and growth rate of CNx (0.072 pressures differ not only in their (average) nitrogen but also in their oxygen content. The chemical composition of the films deposited using pulses of fluences between 0.7 and 2 J cm-2 remains the same within experimental error, while in the 2-10 J cm-2 domain the nitrogen incorporation steeply increases. The growth rates vary from 0.003 to 0.56 angstroms/pulse, increasing linearly with fluence and decreasing with increasing pressure in the 0.7-2 J cm-2 fluence domain, while followed by a supralinear dependence on fluence and less sensitivity to N2 pressure at higher fluences. Changes in film porosity account for the striking features reported.",
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T1 - Dependence of nitrogen content and deposition rate on nitrogen pressure and laser parameters in ArF excimer laser deposition of carbon nitride films

AU - Szörényi, T.

AU - Antoni, F.

AU - Fogarassy, E.

AU - Bertóti, I.

PY - 2000/12/15

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N2 - The effect of N2 pressure and laser fluence on the chemical composition and growth rate of CNx (0.072 pressures differ not only in their (average) nitrogen but also in their oxygen content. The chemical composition of the films deposited using pulses of fluences between 0.7 and 2 J cm-2 remains the same within experimental error, while in the 2-10 J cm-2 domain the nitrogen incorporation steeply increases. The growth rates vary from 0.003 to 0.56 angstroms/pulse, increasing linearly with fluence and decreasing with increasing pressure in the 0.7-2 J cm-2 fluence domain, while followed by a supralinear dependence on fluence and less sensitivity to N2 pressure at higher fluences. Changes in film porosity account for the striking features reported.

AB - The effect of N2 pressure and laser fluence on the chemical composition and growth rate of CNx (0.072 pressures differ not only in their (average) nitrogen but also in their oxygen content. The chemical composition of the films deposited using pulses of fluences between 0.7 and 2 J cm-2 remains the same within experimental error, while in the 2-10 J cm-2 domain the nitrogen incorporation steeply increases. The growth rates vary from 0.003 to 0.56 angstroms/pulse, increasing linearly with fluence and decreasing with increasing pressure in the 0.7-2 J cm-2 fluence domain, while followed by a supralinear dependence on fluence and less sensitivity to N2 pressure at higher fluences. Changes in film porosity account for the striking features reported.

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