Degradation of Ag/Si multilayers during heat treatments

K. Kapta, A. Csík, L. Daróczi, Z. Papp, D. Beke, G. Langer, A. L. Greer, Z. H. Barber, M. Kis-Varga

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Microstructure changes during annealing of nano-crystalline silver and amorphous silicon multilayers (Ag/a-Si) have been studied by X-ray diffraction and transmission electron microscopy. The dc-magnetron sputtered Ag/a-Si multilayers remained stable even after annealing at 523K for 10h, and microstructural changes occurred only above 600K. The degradation of Ag/a-Si multilayers can be described by the increase of size of Ag grains, formation of grooves and pinholes at Ag grain boundaries and by the diffusion of silicon atoms through the silver grain boundaries and along the Ag/a-Si interfaces. This results in thinning of a-Si layers, and in formation of Ag granulates after longer annealing times.

Original languageEnglish
Pages (from-to)85-89
Number of pages5
JournalVacuum
Volume72
Issue number1
DOIs
Publication statusPublished - Sep 12 2003

Fingerprint

Multilayers
heat treatment
Heat treatment
Annealing
degradation
Silver
Degradation
annealing
Grain boundaries
grain boundaries
silver
grain formation
silicon
Silicon
pinholes
Amorphous silicon
grooves
amorphous silicon
Crystalline materials
Transmission electron microscopy

Keywords

  • Ag/a-Si
  • Grain boundary diffusion
  • Interfaces mass transport
  • Multilayer

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Degradation of Ag/Si multilayers during heat treatments. / Kapta, K.; Csík, A.; Daróczi, L.; Papp, Z.; Beke, D.; Langer, G.; Greer, A. L.; Barber, Z. H.; Kis-Varga, M.

In: Vacuum, Vol. 72, No. 1, 12.09.2003, p. 85-89.

Research output: Contribution to journalArticle

Kapta, K. ; Csík, A. ; Daróczi, L. ; Papp, Z. ; Beke, D. ; Langer, G. ; Greer, A. L. ; Barber, Z. H. ; Kis-Varga, M. / Degradation of Ag/Si multilayers during heat treatments. In: Vacuum. 2003 ; Vol. 72, No. 1. pp. 85-89.
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AU - Langer, G.

AU - Greer, A. L.

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