Damage and Trapping Behaviour of Crystalline Silicon at Low Energy Deuterium Implantation

D. Hildebrandt, H. Strusny, R. Groetzschel, E. Kotai, F. Paszti

Research output: Contribution to journalArticle

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)K35-K38
Journalphysica status solidi (a)
Issue number1
Publication statusPublished - Sep 16 1984

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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