Crystallization of chemically vapor deposited molybdenum and mixed tungsten/molybdenum oxide films for electrochromic application

K. A. Gesheva, A. Cziráki, T. Ivanova, A. Szekeres

Research output: Contribution to journalArticle

36 Citations (Scopus)

Abstract

The paper deals with investigation of Mo oxide and mixed W/Mo oxide films showing high electrochromic performance. Films are deposited on Si and conductive glass substrates using pyrolytical decomposition at 200 °C of Mo and W hexacarbonyls in Ar/O2 atmosphere. The study is focused on structural transformation of the films in dependence on deposition and annealing process parameters. In case of conductive glass substrate (typical for electrochromic devices), the crystallization process in Mo oxide films is almost completed at 400 °C forming triclinic MoO2.89 and orthorhombic MoO3 crystalline phases. The structure of mixed W/Mo oxide films is triclinic crystalline phase of tungsten oxide matrix with Mo atoms as substitutes. Discussed are, as well, differences in the crystallization process for the same films, when the substrate is Si. All the films show electrochromic effect, the mixed W/Mo oxide films expressing stronger electrochromic effect with superior color efficiency and optical modulation.

Original languageEnglish
Pages (from-to)4609-4613
Number of pages5
JournalThin Solid Films
Volume515
Issue number11
DOIs
Publication statusPublished - Apr 9 2007

Fingerprint

Molybdenum oxide
molybdenum oxides
Tungsten
tungsten oxides
Molybdenum
Crystallization
Oxide films
molybdenum
oxide films
Vapors
vapors
crystallization
Substrates
Crystalline materials
Electrochromic devices
Glass
Oxides
glass
Light modulation
light modulation

Keywords

  • Chemical vapor deposition
  • Crystallization
  • Electrochromic effect
  • Metal oxide films
  • X-ray diffraction

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Crystallization of chemically vapor deposited molybdenum and mixed tungsten/molybdenum oxide films for electrochromic application. / Gesheva, K. A.; Cziráki, A.; Ivanova, T.; Szekeres, A.

In: Thin Solid Films, Vol. 515, No. 11, 09.04.2007, p. 4609-4613.

Research output: Contribution to journalArticle

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