CRYSTALLIZATION OF AMORPHOUS SILICON FILMS BY PULSED ION BEAM ANNEALING.

J. Gyulai, R. Fastow, K. Kavanagh, M. O. Thompson, C. J. Palmstrom, C. A. Hewett, J. W. Mayer

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)
Original languageEnglish
Title of host publicationMaterials Research Society Symposia Proceedings
EditorsJaydish Narayan, Walter Lyons Brown, Ross A. Lemons
Pages455-460
Number of pages6
Publication statusPublished - Dec 1 1983

Publication series

NameMaterials Research Society Symposia Proceedings
Volume13
ISSN (Print)0272-9172

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Gyulai, J., Fastow, R., Kavanagh, K., Thompson, M. O., Palmstrom, C. J., Hewett, C. A., & Mayer, J. W. (1983). CRYSTALLIZATION OF AMORPHOUS SILICON FILMS BY PULSED ION BEAM ANNEALING. In J. Narayan, W. L. Brown, & R. A. Lemons (Eds.), Materials Research Society Symposia Proceedings (pp. 455-460). (Materials Research Society Symposia Proceedings; Vol. 13).