Crystalline effects in elastic peak electron spectroscopy

G. Gergely, A. Barna, A. Sulyok, C. Jardin, B. Gruzza, L. Bideux, C. Robert, J. Toth, D. Varga

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Abstract

Elastic peak electron spectroscopy (EPES) is confined to incoherent elastic scattering, appearing in the elastic peak intensity Ie. Ion bombardment cleaning disorganizes the surface layer and might produce a component enrichment. EPES was used for the experimental determination of the inelastic mean free path of electrons on ion bombarded Si, GaAs, InP, InSb and GaSb crystals. Imperfect amorphization can produce diffraction or directional elastic peak electron spectroscopy (DEPES) effects influencing the elastic peak intensity. They appear in the Renninger plots of Ie rotating the sample around its azimuthal axis. The problem was met with the inelastic mean free path studies on InSb and GaSb crystalline samples working with a hemispherical analyser. The surface composition after Ar bombardment was checked by in situ X-ray photoelectron spectroscopy and electron energy loss spectroscopy. Using 2 keV Ar+ sputtering, the enrichment of In or Ga was avoided, whereas In metallic phase was formed by 10 keV ions. The energy values of diffraction on Si(111), and III-V (100) crystals was calculated for a cylindrical mirror analyser and for a hemispherical analyser. Incoherent elastic scattering occurs in the minima of Renninger plots. The goal is to avoid diffraction and DEPES effects. They are eliminated by Ar+ ion bombardment. The thickness of the amorphized layer was controlled by the Ar+ ion energy and dose.

Original languageEnglish
Pages (from-to)201-204
Number of pages4
JournalVacuum
Volume54
Issue number1-4
DOIs
Publication statusPublished - Jul 1999
EventProceedings of the 1998 19th International Seminar on Surface Physics - Polanica-Zdroj, Pol
Duration: Jun 15 1998Jun 19 1998

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ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

Cite this

Gergely, G., Barna, A., Sulyok, A., Jardin, C., Gruzza, B., Bideux, L., Robert, C., Toth, J., & Varga, D. (1999). Crystalline effects in elastic peak electron spectroscopy. Vacuum, 54(1-4), 201-204. https://doi.org/10.1016/S0042-207X(98)00460-6