Cross-sectional transmission electron microscopy study of obliquely evaporated silicon oxide thin films

O. Geszti, L. Gosztola, É Seyfried

Research output: Contribution to journalArticle

12 Citations (Scopus)
Original languageEnglish
JournalThin Solid Films
Volume136
Issue number2
DOIs
Publication statusPublished - Feb 15 1986

Fingerprint

Silicon oxides
silicon oxides
Oxide films
Microscopic examination
Transmission electron microscopy
Thin films
transmission electron microscopy
thin films

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Cross-sectional transmission electron microscopy study of obliquely evaporated silicon oxide thin films. / Geszti, O.; Gosztola, L.; Seyfried, É.

In: Thin Solid Films, Vol. 136, No. 2, 15.02.1986.

Research output: Contribution to journalArticle

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