Cross-sectional transmission electron microscopy study of obliquely evaporated silicon oxide thin films

O. Geszti, L. Gosztola, É Seyfried

Research output: Contribution to journalArticle

12 Citations (Scopus)
Original languageEnglish
Pages (from-to)L35-L38
JournalThin Solid Films
Volume136
Issue number2
DOIs
Publication statusPublished - Feb 15 1986

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this