CROSS SECTIONAL TRANSMISSION ELECTRON MICROSCOPY STUDY OF OBLIQUELY EVAPORATED SILICON OXIDE THIN FILMS.

A. Barna, O. Geszti, L. Gosztola, E. Seyfried

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

The columnar structure in obliquely evaporated silicon oxide layers was investigated by transmission electron microscope (TEM). For TEM studies of these layers, samples were made by low angle ion-beam thinning of cross-sections, the planes of which were determined by the normal of the film and the direction of evaporation. Increasing the angle of evaporation from 5 degree to 30 degree (measured from the plane of the substrate), a change from a well-defined columnar structure to a striated structure was observed, for layers evaporated both under 'low-rate' and 'high-rate' conditions. There is a clear-cut dependence of the orientation of columns ( alpha //c) upon the angle of evaporation ( alpha ), however deviating from the 'tangent rule' (tan alpha //c equals 2 tan alpha ).

Original languageEnglish
Title of host publicationMaterials Research Society Symposia Proceedings
EditorsFrank L. Galeener, David L. Griscom, Marvin J. Weber
PublisherMaterials Research Soc
Pages367-374
Number of pages8
ISBN (Print)093183726X
Publication statusPublished - Dec 1 1986

Publication series

NameMaterials Research Society Symposia Proceedings
Volume61
ISSN (Print)0272-9172

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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    Barna, A., Geszti, O., Gosztola, L., & Seyfried, E. (1986). CROSS SECTIONAL TRANSMISSION ELECTRON MICROSCOPY STUDY OF OBLIQUELY EVAPORATED SILICON OXIDE THIN FILMS. In F. L. Galeener, D. L. Griscom, & M. J. Weber (Eds.), Materials Research Society Symposia Proceedings (pp. 367-374). (Materials Research Society Symposia Proceedings; Vol. 61). Materials Research Soc.