Correlation between optical properties of MBE films of AIN and morphology of their surface

S. N. Svitasheva, V. G. Mansurov, K. S. Zhuravlev, Yu A. Nikitin, D. V. Sheglov, B. Pécz

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

In this work we revealed correlation between presence of surface defects and peculiarities in ellipsometric spectra and hence in optical properties of AIN films grown by ammonia MBE technique. We propose to use this fact for the fast and non-destructive checking of film quality. Principal criterions of AIN films quality was both magnitude of phase deviation in maximum and/or a value of false (effective) absorption in transparency field of AIN calculated in according with our model. Our experiments were based on using of spectroscopic ellipsometry (SE). Atomic force microscopy (AFM) was used for determination of geometric size of overlayer roughness. Quantitative parameter related with surface morphology γ s was proposed and influence of surface defects upon phase of light reflected was studied to evaluate surface quality from ellipsometric spectra at once, i.e. without any model calculations. Besides, an impact of surface defects upon film extinction coefficient is demonstrated in case when roughness is not taken into account. This approach could be useful for sterling identical films produced in routine growih procedure. & 2008 WILEY-VCH Verlag GmbH & Co. KGaA.

Original languageEnglish
Pages (from-to)941-944
Number of pages4
JournalPhysica Status Solidi (A) Applications and Materials Science
Volume205
Issue number4
DOIs
Publication statusPublished - Apr 2008

Fingerprint

Molecular beam epitaxy
Optical properties
Surface defects
optical properties
surface defects
roughness
Surface roughness
phase deviation
Spectroscopic ellipsometry
Ammonia
Transparency
ellipsometry
Surface properties
Surface morphology
ammonia
Atomic force microscopy
extinction
atomic force microscopy
coefficients
Experiments

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

Correlation between optical properties of MBE films of AIN and morphology of their surface. / Svitasheva, S. N.; Mansurov, V. G.; Zhuravlev, K. S.; Nikitin, Yu A.; Sheglov, D. V.; Pécz, B.

In: Physica Status Solidi (A) Applications and Materials Science, Vol. 205, No. 4, 04.2008, p. 941-944.

Research output: Contribution to journalArticle

Svitasheva, S. N. ; Mansurov, V. G. ; Zhuravlev, K. S. ; Nikitin, Yu A. ; Sheglov, D. V. ; Pécz, B. / Correlation between optical properties of MBE films of AIN and morphology of their surface. In: Physica Status Solidi (A) Applications and Materials Science. 2008 ; Vol. 205, No. 4. pp. 941-944.
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