Controlled Laser Ablation of Polyimide Substrates

Peter Gordon, Richard Berenyi, Balint Balogh

Research output: Contribution to journalConference article


The paper will describe some results of the research project that aimed at the application of a frequency multiplied Nd:YAG laser for drilling via holes and opening larger windows into copper clad flexible laminates of polyimide base materials. We have investigated the interaction of the laser beam and different polyimide structures. We aimed at finding connection between the behavior of the material and variations of the parameters of the beam, processing and environment. The samples were examined and evaluated many ways to be able to conclude the interaction. Examinations on optical, electrical and reliability parameters of the results were completed. Scanning electron microscope, surface profiler and optical microscopes were used for the geometrical analysis, surface cleanliness has been proved by electro- and electroless plating procedures. The research concluded in new proofs for the material processing mechanism in respect to via and window generation by laser radiation into the polymer layer of aminated flexible substrates.

Original languageEnglish
Pages (from-to)725-730
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - Dec 1 2003
Event2003 International Symposium on Microelectronics - Boston, MA, United States
Duration: Nov 18 2003Nov 20 2003



  • Flexible substrates
  • Laser processing
  • Laser-polymer interaction
  • Windows in TABs

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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