Contribution of EPES in the study of materials

C. Jardin, G. Gergely, B. Gruzza

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

Typical applications of elastic peak electron spectroscopy (EPES) are described in this paper. Because the elastic peak is easily detected on the energy distribution curve of backscattered electrons, low beam current densities may be used to study samples subjected to electron beam damages. Results concerning phthalocyanine layers are discussed. In these molecular materials, C-H bonds are broken during the electron irradiation. Thus, a change of the elastic peak intensity is detected according to the sensitivity of the elastic scattering to the mean atomic number of the material. Contrary to Auger electron spectroscopy, EPES is efficient to detect hydrogen. This is demonstrated by the investigation of hydrolysed titanium alloys. EPES is also useful to study adsorption, segregation, reconstruction etc. of a surface involving components of different atomic numbers. A typical example related to the change of the (100) surface of an indium phosphide substrate during its cleaning procedure is then reported. Elastic scattering can be evaluated with a good accuracy by Monte Carlo simulation. The comparison between experimental and calculated elastic reflection coefficient is very useful in determining inelastic mean free paths of electrons in solids.

Original languageEnglish
Pages (from-to)197-201
Number of pages5
JournalMaterials Chemistry and Physics
Volume32
Issue number2
DOIs
Publication statusPublished - 1992

Fingerprint

Electron spectroscopy
electron spectroscopy
Elastic scattering
Indium phosphide
Electron irradiation
Electrons
Auger electron spectroscopy
Titanium alloys
elastic scattering
Hydrogen
Electron beams
Cleaning
Current density
indium phosphides
titanium alloys
Adsorption
electron irradiation
beam currents
mean free path
cleaning

ASJC Scopus subject areas

  • Materials Chemistry

Cite this

Contribution of EPES in the study of materials. / Jardin, C.; Gergely, G.; Gruzza, B.

In: Materials Chemistry and Physics, Vol. 32, No. 2, 1992, p. 197-201.

Research output: Contribution to journalArticle

Jardin, C. ; Gergely, G. ; Gruzza, B. / Contribution of EPES in the study of materials. In: Materials Chemistry and Physics. 1992 ; Vol. 32, No. 2. pp. 197-201.
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